UHV Manipulator CF40, 200mm travel, Stepper motor
Product description
Z-manipulator, DN40CF, 200mm stroke, 39mm ID, flange to flange distance 120 … 320mm. Movable flange with thread, base flange with through holes. With 2-phase stepper motor drive (Oriental PKP 268), setting accuracy 1µm, with adjustable mechanical end stops. Max. total height 410mm
| Vacuum Suitability | |
|---|---|
| Flange Type | |
| Flange Name | |
| Flange Style |
