621-ZLT-C40-150-SM

UHV Manipulator CF40, 150mm travel, Stepper motor

Delivery time: on request
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Product description

Z-manipulator, DN40CF, 150mm stroke, 39mm ID, flange to flange distance 105 … 255mm. Movable flange with thread, base flange with through holes. With 2-phase stepper motor drive (Oriental PKP 268), setting accuracy 1µm, with adjustable mechanical end stops. Max. total height 345mm

Additional information

Vacuum Suitability

Flange Type

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