DN16CF 316LN, Quartz viewport, EUV quality
803,00 € ex. VAT
Product description
DN16CF Flange (AISI 316LN) with Viewport in EUV Quality
Parallelism: < 10 Arc Seconds
Flatness: λ/4@632nm Transmitted Wavefront
Surface Finish: 20/10 Scratch-Dig
Thermal Range: -100°C – 200°C
Material: Corning HPFS 7980 Excimer Grade Fused Silica
Transmission: > 99,5%@193nm(Internal)
Homogeneity: Grade A
Inclusion Class: 0
Magnetic Permeability: (μr < 1.01)
Use annealed copper gaskets
| Vacuum Suitability | |
|---|---|
| Flange Type | |
| Flange Name | |
| Flange Material | |
| Flange Style | |
| Min. Operating Temperature (°C) | |
| Max. Operating Temperature (°C) | |
| Magnetic | |
| Part Type | |
| Viewport Diameter (mm) | |
| Viewport Material | |
| Coating | |
| Transmitted Wavefront Distortion (TWD) | |
| Polish | |
| Parallelism | |
| Inclusions | |
| Homogeneity |
