DN63CF Quartz VP, AR Coated 248nm
1.586,00 € ex. VAT
Product description
DN63CF coated quartz viewing window, EUV grade, with single line coating 248nm with <0.25% loss / area
viewing diameter 68mm
Usable tempered diameter 50mm
Homogeneity Grade A, Inclusions Class 0
Flatness lambda/4 @632nm
Parallelism < 10 arc sec
polish 20/10 scratch / dig
Temp. range -100 … +200°C
Leak rate < 2x 10-10 mbar l/s He (without He diffusion through quartz)
| Vacuum Suitability | |
|---|---|
| Flange Type | |
| Flange Material | |
| Flange Style | |
| Min. Operating Temperature (°C) | |
| Max. Operating Temperature (°C) | |
| Part Type | |
| Viewport Diameter (mm) | |
| Viewport Material | |
| Coating | |
| Transmitted Wavefront Distortion (TWD) | |
| Polish | |
| Anti-Reflex Coating Wavelength | |
| AR Coating Reflectance | |
| Parallelism | |
| Inclusions | |
| Homogeneity | |
| Laser Damage Threshold | |
| AR Coated View Diameter (mm) |
